题  目：基于超精密加工微结构和计算视觉的精密定位测量

演讲人：赵晨阳

时  间：2019年3月15日10：30

地  点：哈工大（深圳）A507

摘要：

目前的精密定位测量方法主要局限在于单功能测量、长时间标定、受外部环境影响大等问

题。在本报告中，介绍一种新的基于超精密加工微结构和计算视觉的精密定位测量方法。首先，利用超精密加工技术设计、制造出一种微结构表面，使其图案具有各向异性，为测量系统提供坐标系。之后，基于计算视觉理论开发出适用于定位测量的算法，主要包括模板匹配、加速稳健特征（SURF）、像素插值等方面。结合微结构表面图像和算法匹配，实现定位。实验结果表明，本方法在线性位移测量中可达到亚微米级不确定度，分辨率可达到10nm级。最后，利用该方法搭建平台测量机床重复度，与激光干涉仪方法比较测量结果和优缺点。本报告中的工作充分利用了精密制造和计算科学领域的学科交叉，促进精密定位测量领域的突破。

报告人简介：

赵晨阳博士于2014年本科毕业于哈尔滨工业大学，2019年博士毕业于香港理工大学。他曾于2018年作为访问学者在密西根大学交流。赵晨阳博士目前是香港理工大学超精密加工国家重点实验室的一名研究员。截至目前，他已发表了16篇期刊或会议论文，其中以第一作者身份发表4篇SCI期刊论文。其研究方向主要包括精密测量、超精密加工、图像处理、机器学习等。

Title：Development of an Ultra-Precision Diamond-Machined Polar Microstructure for Computer Vision-Based Precision Positioning Measurement

Abstract:

The current limitations of precision positioning measurement methods are single-axis measurement, time-consuming calibration, and serious external environmental influence. In this report, we would _like_ to introduce a novel precision positioning measurement based on an ultraprecision diamond-machined polar microstructure and computer vision technology. In the first part of this report, the polar microstructure is introduced which is designed and manufactured with ultraprecision machining process chain combined with single point diamond turning and grooving. The design requirements and the modeling process is given, as well as the function performance validation of polar microstructure. After that, the template matching and speed-up and robust feature-based algorithms are developed for the precision positioning measurement. Lastly, the novel method is applied to measure the repeatability of the machine tool and the results are compared with that of laser interferometer. The research work of this project will make full use of the intersection of disciplines in the field of precision manufacturing and computer science to promote breakthroughs in the field of precision positioning measurement.

Biography:

Dr. Chenyang Zhao received his Bachelor’s degree from Harbin Institute of Technology in 2014, and his Doctoral degree from The Hong Kong Polytechnic University. He was the visiting scholar of University of Michigan in 2018. Dr. Chenyang Zhao is currently a research fellow of State Key Laboratory of Ultraprecision Machining. Up to present, he has published 16 journal and conference papers, which including 4 SCI papers with the first author. His research areas include precision measurement, ultraprecision machining, image processing, and machining learning etc.